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MBraun OLED Thin Film Deposition (TFD) - Evaporator Systems

MBraun's thin film deposition systems are engineered for use in university research, as well as in large-scale industrial applications. We offer both standard and custom thin film deposition systems.

Building multi-layer thin film layers requires pure atmospheric conditions (<1 ppm of Oxygen and moisture), and that fine particles are removed quickly, reliably and continuously. MBraun's OLED/PLED thin film evaporative gloveboxes have been designed for the deposition of multilayer thin films; without disturbing intermediate layers caused by physi, or chemi-sorption.

MBraun's thin film deposition systems and components are highly reliable systems that routinely achieve coating uniformities of <5% in semiconductor device fabrication applications. Product configurations range from stand-alone bell jars to automatic loading systems in gloveboxes for the coating of wafers (and other applications) ranging in size from 2" to 300mm.
 
Integrated Thin Film Deposition (TFD) Evaporator Systems

                                                                                            Glovebox for thin film deposition                          

 

 

 

 

          Spincoater

MB EVAP Specifications

Deposition Tool with OLED Sources

Glove box integrated deposition systems include:

  • MBraun inert glove boxes

  • Multi-source thermal deposition                                              

  • RF or DC sputtering, E-beam options

  • 500mm vacuum chamber

  • Bell jar options

  • Turbomolecular pump stacks

  • Cryogenic pump stacks

  • Rate & thickness monitoring

  • Substrate heating, cooling & rotation

  • Source & substrate shutters

View Data Sheet  | Request more information
Stand Alone Thin Film Deposition (TFD)

MBraun Stand Alone Evaporator

Stand-Alone Evaporator - Inside View

MB EVAP S/A Specifications

The MB-EVAP S/A vacuum deposition system is a high quality, stand alone, research & development tool designed for all of your thin film requirements. The M.E.S.A. system comes standard as a 2 to 4 resistive source system with the capability to deposit in sequence or simultaneously and can also be configured to include RF or DC sputter sources as well as e-beam sources. Our design incorporates many of the high quality components used by similar suppliers while still allowing MBraun to offer our systems at a cost competitive price. MBraun can configure the M.E.S.A. system to meet your exact requirements in addition to offering a system designed for easy integration to an MBraun inert atmosphere glovebox system. Please contact MBraun for more information on this product.

Options include:

  • 2 to 4 resistive sources

  • RF or DC sputtering

  • E-beam sources

  • 500mm vacuum chamber

  • Turbomolecular pump stacks

  • Cryogenic pump stacks

  • Rate & thickness monitoring

  • Substrate heating & cooling

  • Substrate rotation

  • Source & substrate shutters

View Data Sheet  | Request more information
  Evaporator Components

Evaporator Module

evaporator, evaporators,
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Stainless Steel Bell Jar

bell jar, evaporator, evaporators
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 Evaporator System Chamber Door

evaporator, evaporators, chamber door, evaporator system
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ISO 9001:2000 Certified
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